SDL Series
01
FEATURE
Available to large size wafer & FPD
Large capacity available
by combination.
Larger than 150kL/min
also available on demand.
02
FEATURE
Shorter cycle-time
Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.
Pumps for solvent evacuation are also lined-up
Major Products
Spec. / Products | SDL12E50 | SDL20E50 | SDL36M60 | SDL40E60 | SDL40E201 | SDL40EW201 | SDL80201 |
Max. pumping speed [L/min] *1 | 25,000 | 50,000 | 60,000 | 70,000 | 80,000 | 150,000 | 170,000 |
Ultimate pressure [Pa] *1 | 0.8 | 0.5 | 0.8 | 5.0 | |||
Supply voltage (50/60Hz) | 3Phase AC200~220V,?380~480V | 3Phase AC380~440V |
*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
S-P Curve
* S-P curves vary by combination.