The production system Tetra 375 with its 375-litrechamber volume and PC control is used in series production (cleaning, etchingand activation).
Special plasma system Tetra 375-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 2100 mm, D 800 mm
Chamber:
W 600 mm, H 360 mm, D 1900 mm
Chamber volume:
approx. 375 litres
Gas supply:
2 gas channels via MFCs
Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus