The production system Tetra 240, with its 240-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation).
Special plasma system Tetra 240-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 1700 mm, D 3200 mm
Chamber:
W 305 mm, H 300 mm, D 2600 mm
Chamber volume:
approx. 240 litres
Gas supply:
3 gas channels via MFCs
Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus